https://ogma.newcastle.edu.au/vital/access/ /manager/Index ${session.getAttribute("locale")} 5 Generalized predictive control of temperature on an atomic layer deposition reactor https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:26197 Sat 24 Mar 2018 07:37:07 AEDT ]]> Temperature control for nano-scale films by spatially-separated atomic layer deposition based on generalized predictive control https://ogma.newcastle.edu.au/vital/access/ /manager/Repository/uon:26173 Sat 24 Mar 2018 07:30:07 AEDT ]]>